Influence of surface morphology on sputtering yields
نویسندگان
چکیده
منابع مشابه
Influence of surface morphology on sputtering yields
We study the variation of sputtering yields with surface morphologies under the assumption of a specially prescribed surface shape. Compared with a flat surface, we show that surface morphology can cause a decrease in the sputtering yield and an increase in the incident angle where sputtering yield is maximum. Based on Sigmund’s theory, an analytical formula for the morphology dependent sputter...
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As extensive experimental studies have shown, under certain conditions, ion bombardment of solid targets induces a random (self-affine) morphology on the ion-eroded surfaces. The rough morphology development is known to cause substantial variations in the sputtering yields. In this article, we present a theoretical model describing the sputter yields from random, self-affine surfaces subject to...
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Off-normal ion bombardment of solid targets with energetic particles often leads to development of periodically modulated structures on the surfaces of eroded materials. Ion-induced surface roughening, in its turn, causes sputtering yield changes. We report on a comprehensive theoretical study of the effect of rippled surface morphology on the sputtering yields. The yield is computed as a funct...
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ژورنال
عنوان ژورنال: Journal of Physics D: Applied Physics
سال: 2009
ISSN: 0022-3727,1361-6463
DOI: 10.1088/0022-3727/42/16/165304